Test head for optically inspecting workpieces
US7305119B2 · kind B2 · utility
70Cited by
12References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 22, 2005 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Nov 25, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9506
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for simultaneously optically inspecting top and bottom surfaces of a workpiece comprise upper and lower test heads, each head comprising at least one laser for providing a laser beam that scans its associated workpiece surface and at least one detector for detecting reflected laser light. The directions of the laser beams are selected so as to reduce or prevent cross-talk interference between the upper and lower test heads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.