Micromechanical pressure sensor element and method for using a pressure sensor element of this type
US7305874B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 20, 2006 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Jun 20, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB60C23/0408
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical pressure sensor element, in particular for tire pressure measurement. The device has at least: a layer system having a diaphragm underneath which a cavity is formed, which is separated from an external space outside the pressure sensor element; a measuring device for measuring a deflection of the diaphragm; and a seismic mass formed on, underneath, or in the diaphragm. Furthermore, in a method for using such a pressure sensor element, the pressure sensor element is operatable in a sleep mode having lower power consumption and in an operating mode having higher power consumption; in the sleep mode a change in the measuring signals of the measuring device over time is checked, and if a relevant change in the measuring signals is detected, a position change is inferred and a switchover to the operating mode is performed, in which the measuring signals of the measuring device or the analysis signals formed from the measuring signals are transmitted via a transmitter, for example, an antenna.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.