Resonant micro-electro-mechanical system with analog driving
US7305880B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2005 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Dec 9, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance frequency. The driving device includes a differential sense amplifier supplying first signals indicative of a velocity of oscillation of the mass, and an actuation and control stage supplying second signals for driving the mass on the basis of the first signals. The driving device moreover includes a filtering circuit of a high-pass type, which is connected between the differential sense amplifier and the actuation and control stage, and has a bandpass that includes the resonance frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.