Optical interferometric pressure sensor
US7305888B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 1, 2006 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Aug 1, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49776
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vacuum measuring cell has a first housing body and a membrane, both of Al2O3 ceramic or sapphire. The membrane is planar with a peripheral edge joined by a first seal to the first housing body to form a reference vacuum chamber. A second housing body of Al2O3 ceramic or sapphire opposite the membrane, is joined to the peripheral edge of the membrane by a second seal to form a measurement vacuum chamber. A port connects the vacuum measuring cell to a medium to be measured. At least in the central area of the first housing body, an optical transparent window is formed and at least the central region of the membrane has an optically reflective surface. Outside the reference vacuum chamber, in opposition to and at a distance from the window, an optical fibre is arranged for feeding in and out light onto the surface of the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.