Method and machine for replicating holographic gratings on a substrate
US7306827B2 · kind B2 · utility
18Cited by
112References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2002 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Jun 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1809
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A machine and process for a pattern, such as a submicron grating pattern onto a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.