Method for the optical characterization of materials without using a physical model

US7307723B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventor

• Jerome Hazart · Eybens, FR

Key dates

• Filing date: Dec 24, 2003
• Grant date: Dec 11, 2007
• Expiry date: Apr 16, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/213
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method of optical characterization of a layer of material in which the spectrum of index n* (λ) is characterized by a limited number of “nodes” that are points with coordinates (λi, ni, ki) or (λi, n*i), with ni=n(λi), ki=k(λi) and n*i=ni+jki, where j2=−1, and an interpolation law between the “nodes,” which can be, for example, linear, cubic, of “spline” type or polynomial (of any given degree). This interpolation law allows the calculation, from the “nodes,” of the refraction indexes and the extinction coefficients for the wavelengths located between the “nodes.”