Patent · US Expired

High-resolution spatial light modulation

US7307777B2 · kind B2 · utility

17Cited by
8References
10Claims
0Family size

Assignee

Inventor

Key dates

Filing dateFeb 3, 2006
Grant dateDec 11, 2007
Priority date
Expiry dateMar 30, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/0841
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.