High-resolution spatial light modulation
US7307777B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 3, 2006 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Mar 30, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.