Pressure sensor fault detection
US7308830B2 · kind B2 · utility
12Cited by
55References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2006 |
| Grant date | Dec 18, 2007 |
| Priority date | — |
| Expiry date | Jan 26, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A diagnostic system for a pressure sensor having a cavity configured to receive on applied pressure is provided. The cavity has a first and a second wall. A deflectable diaphragm is positioned in the cavity and configured to form a first and a second capacitance with the first wall and a third and a fourth capacitance with the second wall which change in response to the applied pressure. The capacitances form a first transfer function and a second transfer function. Changes in the first transfer function relative to the second transfer function are detected to provide a diagnostic output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.