Apparatus and method for low coherence ranging
US7310150B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2003 |
| Grant date | Dec 18, 2007 |
| Priority date | — |
| Expiry date | Feb 20, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/4795
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, apparatus and method for performing low coherence ranging of a sample with high transverse resolution and large depth of focus can be provided. For example, an optical ranging system including a light source can be used. Certain exemplary arrangement can be provided, e.g., a first arrangement for directing light from the light source to the sample, a second arrangement for directing reflected light from the sample to a detector, at least one detector, and a third arrangement for processing light data received by the detector and which generates an image can be utilized. Further, for example, an optical element can be provided which can have a transverse resolution defined as .Δris less than or equal to about μ5 m, and a depth of focus Δz of at least about 50 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.