Portable manipulator for stackable semiconductor test system
US7312604B2 · kind B2 · utility
2Cited by
10References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2005 |
| Grant date | Dec 25, 2007 |
| Priority date | — |
| Expiry date | Oct 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention provides a manipulator for positioning a test head relative to a prober or other reference. The manipulator has a frame; a linkage coupled to the frame and including first and second links having freedom of rotation about respective pivots and a third link coupled to the first and second links such that the third link has translational and rotational degrees of freedom of movement; and an adaptor coupled to the third link and configured to attach to a test head. The invention also provides a method of controlling the manipulator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.