Fluorinated adamantane derivatives
US7314952B2 · kind B2 · utility
1Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2005 |
| Grant date | Jan 1, 2008 |
| Priority date | — |
| Expiry date | Sep 2, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C2603/74
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention provides novel compounds which are useful for the production of fluorinated adamantane derivatives excellent in etching resistance and useful as photolithographic material and so on. Namely, the present invention provides compounds represented by the following formulae (3) and (4):A(-G-Q-R)n (3)Af(-Gf-Q-Rf)n (4)provided that the symbols in the formula have the following meanings:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.