Micro-electromechanical system (MEMS) based current and magnetic field sensor having capacitive sense components
US7315161B2 · kind B2 · utility
18Cited by
6References
14Claims
0Family size
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Key dates
| Filing date | May 13, 2005 |
| Grant date | Jan 1, 2008 |
| Priority date | — |
| Expiry date | Jul 19, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.