Cyclohexadien-2,4-ylsilane and its derivatives, synthesis of the same, and the pyrolysis of the same to silane
US7319159B1 · kind B1 · utility
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20Claims
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Key dates
| Filing date | Sep 13, 2006 |
| Grant date | Jan 15, 2008 |
| Priority date | — |
| Expiry date | Sep 13, 2026 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/0896
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Silane gas precursor compounds having the formula (I):wherein R1, R2, and R3 each can independently be hydrogen or halogen and wherein the cyclohexadiene ring can have one or more substituents selected from the group consisting of a saturated or unsaturated, straight chain or branched alkyl group, a halogen, NO2, and C≡N are disclosed. In one form, the silane gas precursor compound is cyclohexadien-2,4-ylsilane, an air-stable liquid, that can be thermolyzed in a pyrolysis process to efficiently generate high purity silane gas. The compounds of the present invention can thus serve as a “point-of-use” precursor for silane gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.