Chemical filter and fan filter unit having the same
US7320721B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2005 |
| Grant date | Jan 22, 2008 |
| Priority date | — |
| Expiry date | Apr 11, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2279/51
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
In a fan filter unit for filtering and continuously supplying clean air into a clean room, the fan filter unit includes a chemical filter for removing chemical contaminants contained in the air, a fan for sucking and blowing out the air, and a particle filter for removing particles such as dusts and moisture contained in the air. A filter medium of the chemical filter has a circular tube shape and is disposed between an inner circular tube and an outer circular tube. A cover is detachably combined with top portions of the inner and the outer circular tubes, and prevents air flow through the top portions of the inner and outer circular tubes. The air is sucked only through the outer circular tube, the chemical filter and the inner circular tube by a suction force of the fan. Accordingly, velocity distribution of the air passing through the chemical filter may be improved and lifetime of the chemical filter may be increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.