Vibration resistant interferometry
US7321430B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 22, 2005 |
| Grant date | Jan 22, 2008 |
| Priority date | — |
| Expiry date | Jan 14, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Scanning interferometry data for a test object is provided, the data typically including intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location define an interference signal for the spatial location, and the intensity values for a common scan position define a data set for that scan position. Scan values are provided for each scan position, in which scan value increments between various scan values can be non-uniform. Information is determined about the test object based on the scanning interferometry data and scan values. The determination includes transforming at least some of the interference signals into a frequency domain with respect to the scan values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.