Method for producing a micromachined layered device
US7322100B2 · kind B2 · utility
2Cited by
3References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2004 |
| Grant date | Jan 29, 2008 |
| Priority date | — |
| Expiry date | Apr 8, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49798
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Methods for producing micromachined layered devices having a membrane layer and a first and second layer on both sides of the membrane layer are disclosed. The method includes applying a membrane layer to a substrate, opening a window in the substrate so as to enable the addition of layers from both sides of the membrane layer while the substrate is made into a frame that supports the membrane layer during processing, adding at least one layer on each side of the membrane either simultaneously or on one side at a time, and removing the device from the substrate frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.