Pressure gauge for organic materials
US7322248B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 29, 2006 |
| Grant date | Jan 29, 2008 |
| Priority date | — |
| Expiry date | Aug 29, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperature coefficient of resistance greater than 0.0035/° C., the filament being subject to the vaporized organic or inorganic material; means for applying a current to the filament so that the temperature of the filament is less than 650° C. so as not to degrade the molecular structure of the organic material; and a structure responsive to a change in resistance or a change in current to determine heat loss from the filament, which is a function of the pressure of the vaporized organic or inorganic material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.