Method of manufacturing a fluid ejection device with a dry-film photo-resist layer
US7325309B2 · kind B2 · utility
5Cited by
19References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 8, 2004 |
| Grant date | Feb 5, 2008 |
| Priority date | — |
| Expiry date | Feb 5, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Methods of manufacturing a fluid ejection device comprise, in one embodiment, forming filler structures on a substrate and laminating a dry film onto the substrate over the filler structures. The dry film defines a barrier layer around the filler structures and an orifice layer above the filler structures. The filler structures are removed to form voids within the barrier layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.