Substrate holding device including adhesive face with hexagons defined by convex portions
US7326457B2 · kind B2 · utility
2Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2003 |
| Grant date | Feb 5, 2008 |
| Priority date | — |
| Expiry date | May 31, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2883
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a method of the present invention for holding a substrate in a vacuum, a glass substrate (5) is held by an adhesive pad (20) or an adhesive sheet, both of which are made from a material containing a diene based resin, whereby an adhesive agent is prevented from remaining on the substrate, and the adhesive sheet can be detached with ease from the substrate after assembling the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.