Parylene-based flexible multi-electrode arrays for neuronal stimulation and recording and methods for manufacturing the same
US7326649B2 · kind B2 · utility
31Cited by
2References
16Claims
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Key dates
| Filing date | May 16, 2005 |
| Grant date | Feb 5, 2008 |
| Priority date | — |
| Expiry date | May 16, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/016
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Method for manufacturing a parylene-based electrode array that includes an underlying parylene layer, one or more patterned electrode layers comprising a conductive material such as a metal, and one or more overlying parylene layers. The overlying parylene is etched away or otherwise processed to expose the electrodes where stimulation or recording is to occur. All other conductive material in the device is occluded from the environment by the two layers of parylene surrounding it.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.