Method for manufacturing a liquid jetting head
US7328490B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2004 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Jul 16, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method for manufacturing a liquid jetting head includes manufacturing a piezoelectric element having consistently high piezoelectric characteristics that obtains a degree of orientation that is suitable for a piezoelectric thin film, that is stable, and that has good reproducibility. A Ti film is formed on a layered bottom electrode, piezoelectric material layers constituting a piezoelectric thin film are formed in a plurality of cycles of layer formation, and a top electrode is formed on the piezoelectric thin film to produce a piezoelectric element. When the piezoelectric material layers are formed, the annealing temperature of the first cycle of layer formation is set higher than the annealing temperature of the other cycles of layer formation. In addition, the annealing time of the first cycle of layer formation is made longer than the annealing time of the other cycles of layer formation. The degree of orientation in the 100 plane is thereby increased, and the bottom electrode can be prevented from undergoing oxidation or Pd diffusion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.