Plate-shaped work piece transporting apparatus
US7329299B2 · kind B2 · utility
6Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2004 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Nov 5, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
It is an object of the present invention to provide a plate-shaped work piece transporting apparatus that has a fan, a dust-removal filter disposed above this fan, and a plate-shape porous member disposed above the dust-removal filter. By forming a chamber in which air can accumulate between the porous member and the dust-removal filter, it is possible to suppress air pulsations. Further, by providing support members on the porous member, the plate-shaped work piece can be supported and damage thereto can be avoided when the plate-shaped work piece, which is supported by air from the fan, drops to below a set height.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.