Deposition of carbon-containing layers using vitreous carbon source
US7329595B2 · kind B2 · utility
0Cited by
5References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2005 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Apr 26, 2025 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B2018/1432
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An effusion source comprises a vitreous C filament and a heater to increase the temperature of the filament to produce a C vapor. Also described is a deposition method comprising (a) depositing a layer of material on a substrate, and (b) during step (a), heating a body of material that includes vitreous carbon so that carbon from the body is vaporized and incorporated into the deposited layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.