Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part
US7329611B2 · kind B2 · utility
2Cited by
4References
42Claims
0Family size
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Key dates
| Filing date | Apr 10, 2003 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Mar 25, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/315
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a formation method for forming a fine structure in a workpiece containing an etching control component, using an isotropic etching process, a mask having an opening is applied to the workpiece, and the workpiece is etched with an etching solution to thereby form a recess, corresponding to a shape of the opening, in a surface of the workpiece. The etching of the workpiece is stopped due to the etching control component eluted out of the workpiece in the etching solution within the recess during the isotropic etching process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.