Ceramic heater and method for producing ceramic heater
US7329842B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2006 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Nov 1, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A ceramic heater including a plate member made of insulating ceramics in which one or more pair(s) of through-holes are formed, a rod member made of conductive ceramics with a power-supply terminal at one end. The rod member is inserted into the through hole in the plate member. A conductive layer made of conductive ceramics is formed on the plate member; and a coating layer made of insulating ceramics is formed on the conductive layer. One end face of the rod member has a same plane with a main surface of the plate member, the conductive layer has a heater pattern formed on the main surface of the plate member, and the rod members are electrically insulated not to be short-circuited to each other in the opposite main surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.