Alignment method of micro-alignment members and device thereof
US7330308B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 2005 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Aug 27, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3616
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An alignment method of micro-alignment members includes a first step for moving a reticle, which is movably disposed between a first position and a second position, to face a first microscope in the first position, and for aligning a center of the reticle with an optical axis of the first microscope while observing the reticle by the first microscope, a second step for moving the reticle to the second position to face a second microscope in the second position, and for aligning the center of the reticle with an optical axis of the second microscope while observing the reticle by the second microscope, a third step for disposing a first micro-alignment member such that a center of the first micro-alignment member aligns with the optical axis of the second microscope, and a fourth step for disposing a second micro-alignment member instead of the reticle to face the first micro-alignment member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.