Semiconductor-type three-axis acceleration sensor
US7331230B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 24, 2004 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Dec 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0842
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a semiconductor-type three-axis acceleration sensor having a high shock resistance, a small difference between outputs of piezo resistors of X-axis, Y-axis and Z-axis, a small size, high sensitivity and a high output. A flexible arm is composed of flexible widening parts and a flexible parallel part. The flexible widening part has a maximum stress part. The piezo resistors are arranged on an upper surface of the flexible arm so that a terminal of the piezo resistor is positioned at the maximum stress part. The Z-axis piezo resistors are positioned close to the width centerline of the flexible arm, while the X-axis and Y-axis piezo resistors are apart from the width centerline. Moreover, the Z-axis piezo resistors are shifted in the longitudinal direction of the flexible arm from the maximum stress part so as to reduce the output difference between the X-axis, Y-axis and Z-axis piezo resistors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.