Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
US7331714B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2005 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Jan 10, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2252
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.