Fabrication of narrow-band thin-film optical filters
US7332044B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2005 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Jan 27, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1075
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A multi-layer thin-film narrow-band filter is fabricated by a process wherein each half of a symmetric stack is deposited under exact conditions, either successively or contemporaneously. The two halves of the filter structure are then combined and bonded together using a wet bonding process that remains reversible for a period of time sufficient for testing the filter and, if necessary, for separating the two halves to regain access to the spacer layer. Accordingly, the spacer layer may be adjusted to shift the peak wavelength, if necessary, to the precise design specifications for a particular application. After correction, the components of the symmetric filter are bonded again using the same wet process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.