Coated refractory metal plate having oxide surface layer, and setter which uses the same and which is used in sintering
US7332228B2 · kind B2 · utility
3Cited by
4References
23Claims
0Family size
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Key dates
| Filing date | Feb 24, 2004 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Oct 11, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12667
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A setter used in sintering and having an oxide coating layer is configured such that oxide powder of at least one of, or a mixture of oxide powders of two or more of alumina, silica, zirconia, yttria, titania, magnesia, and calcia is deposited to at least one surface of a metal composed of molybdenum, tungsten, or an alloy of a molybdenum group and a tungsten group, and a deposition surface thereof allows no exposure of the base material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.