Antireflective coatings for high-resolution photolithographic synthesis of DNA arrays
US7332273B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2002 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Jun 20, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC40B40/06
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention provides an array of polymers and methods of forming arrays of polymers by providing a substrate having a first layer including one or more dielectric coatings on a solid support and a second layer including a plurality of polymers disposed on the first layer. The invention also provides methods for forming an array of polymers on a substrate using light-directed synthesis by providing a substrate having a first layer including one or more dielectric coatings on a solid support; derivatizing the first layer by contacting the first layer with a silanation reagent, and a second layer disposed on said first layer wherein the second layer includes functional groups protected with a photolabile protecting group.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.