Piezoelectric/electrostrictive film type device and method of manufacturing the same
US7332851B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2005 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Sep 22, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A piezoelectric/electrostrictive film device is provided including a thin ceramic substrate and a piezoelectric/electrostrictive operating portion disposed on the substrate. The piezoelectric/electrostrictive operating portion includes a lower electrode film, a piezoelectric/electrostrictive film including a large number of crystal particles having a piezoelectric/electrostrictive composition, and an upper electrode film successively laminated on the substrate. The piezoelectric/electrostrictive composition excludes lead and contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of at least 90% of the crystal particles in the piezoelectric/electrostrictive film are in a range of 0.3 to 50 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.