Line pressure measurement using differential pressure sensor
US7334484B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2005 |
| Grant date | Feb 26, 2008 |
| Priority date | — |
| Expiry date | May 27, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L13/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the cavity deflects in response to the first and second process fluid pressures. A first primary electrode couples to a wall of the cavity and forms a first primary capacitor between the first primary electrode and the deflectable diaphragm. A first secondary electrode couples to the wall of the cavity to form a first secondary capacitor between the first secondary electrode and the deflectable diaphragm. A second primary electrode and second secondary electrode are preferably coupled to a wall of the cavity opposite the first. Line pressure of the process fluid is determined based upon variation in the secondary capacitors relative to the primary capacitors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.