Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical
US7334708B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 21, 2002 |
| Grant date | Feb 26, 2008 |
| Priority date | — |
| Expiry date | Jul 16, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2270/0518
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks. The invention also relates to a method for delivering an ultrapure chemical from a chemical container to a point of use, by connecting a chemical container block, containing an ultrapure chemical, to a chemical delivery block and introducing the ultrapure chemical to a point of use. The methods may also include the use of one or more integral blocks. The chemical delivery systems and methods of the invention may be used in a variety of…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.