Method and apparatus for lubricating microelectromechanical devices in packages
US7335535B2 · kind B2 · utility
3Cited by
14References
65Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 2005 |
| Grant date | Feb 26, 2008 |
| Priority date | — |
| Expiry date | Oct 20, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/0096
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.