Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
US7336367B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2007 |
| Grant date | Feb 26, 2008 |
| Priority date | — |
| Expiry date | Jan 18, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.