High flux, high energy photon source
US7339181B2 · kind B2 · utility
2Cited by
10References
7Claims
0Family size
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Key dates
| Filing date | Nov 7, 2003 |
| Grant date | Mar 4, 2008 |
| Priority date | — |
| Expiry date | Feb 1, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0088
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.