Sensor arrangement consisting of light-sensitive and/or X-ray sensitive sensors
US7339246B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2002 |
| Grant date | Mar 4, 2008 |
| Priority date | — |
| Expiry date | Aug 26, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/30105
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a large-area sensor arrangement, notably a flat dynamic X-ray detector (FDXD). The light-sensitive and/or X-ray-sensitive sensors (pixels) of the sensor arrangement are arranged in a planar distribution on a substrate (1), thus forming a sensitive layer (20). On the top surface of the layer (20) there is provided a contact point (23) for each sensor, which contact point is connected to an integrated circuit (6) via one or more connection layers (30, 40). A multi-layer, very compact construction is thus obtained in which the electronic evaluation circuitry (6) is arranged in a planar fashion and parallel to the sensors (20). Preferably, a respective evaluation circuit in the circuit (6) is associated with each sensor, resulting in very short paths and also in a reduction of noise.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.