Tunable resonator with MEMS element
US7339446B2 · kind B2 · utility
13Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2005 |
| Grant date | Mar 4, 2008 |
| Priority date | — |
| Expiry date | Dec 5, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2210/015
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.