Capping unit and control method for same, liquid droplet ejection apparatus and device manufacturing method
US7341327B2 · kind B2 · utility
4Cited by
4References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 7, 2004 |
| Grant date | Mar 11, 2008 |
| Priority date | — |
| Expiry date | Nov 7, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/16508
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A capping apparatus including: a sealing unit that seals at least nozzle apertures of a liquid droplet ejection head that ejects liquid droplets; a heating unit that heats at least a vicinity of the nozzle apertures; and a negative pressure supplying unit that supplies an interior of the sealing unit with negative pressure that causes liquid droplets to be ejected from the nozzle apertures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.