Actuator with reduced drive capacitance
US7344228B2 · kind B2 · utility
4Cited by
6References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2004 |
| Grant date | Mar 18, 2008 |
| Priority date | — |
| Expiry date | Jan 9, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14491
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Techniques are provided for reducing the amount of power required to activate a piezoelectric actuator of a microelectromechanical structure. An insulating layer is deposited on a piezoelectric layer. The insulating layer is etched to remove a portion of the layer and expose the piezoelectric layer in the etched areas. An electrode layer is deposited on the piezoelectric layer and insulating layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.