Nanoscale displacement detector
US7347085B2 · kind B2 · utility
9Cited by
3References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 16, 2005 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Aug 30, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A nanoscale displacement detector includes a cantilever integrated with an optical resonator, referred to herein as a “microresonator.” The microresonator and cantilever are configured such that displacement of the cantilever relative to the microresonator causes a change in the resonant frequency of the microresonator. The change in the resonant frequency of the microresonator is used to monitor cantilever displacement. In an embodiment, the microresonator includes a cavity that faces the cantilever and the cantilever includes a protrusion that faces the microresonator and is aligned with the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.