Metal line structure of optical scanner and method of fabricating the same
US7348535B2 · kind B2 · utility
1Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2006 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Jun 13, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A metal line structure of an optical scanner and a method of fabricating the same are provided. The metal line structure of the optical scanner includes: a glass substrate having a metal line region etched to a predetermined depth; a metal line formed in the metal line region; a diffusion barrier layer that is formed on the glass substrate and covers the metal line; and an optical scanner structure combined with the glass substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.