Process for manufacturing a multipolar electrode arrangement and multipolar electrode arrangement
US7348552B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 11, 2005 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Sep 26, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/4255
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for the production of a multipolar electrode configuration (1) for focussing or mass filtration of a beam of charged particles includes attaching a number of round-pole shaped electrode blanks (9)—but only a fraction of the total number of electrodes (2) required for said electrode configuration (1)—to one or a number of support elements (4); simultaneous processing of the end parts (6) of the support element(s) (4) and of the electrode blanks (9) attached to the support element(s) (4) in one process step in such a way that each electrode blank (9) is processed into an electrode (2) with a cross section, having a circular section (KA) and a non-circular, section (HA), and at the end of said simultaneous processing the support element(s) (4) having two differently shaped end parts (6), whereby the respective shapes of said end parts (6) are adapted to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.