Sensor unit, exposure apparatus, and device manufacturing method
US7352441B2 · kind B2 · utility
1Cited by
2References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 28, 2006 |
| Grant date | Apr 1, 2008 |
| Priority date | — |
| Expiry date | Dec 28, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A sensor unit includes a substrate that has a first mark, and a second mark used to specify a position of the first mark, a sensor for detecting light that has transmitted through the first mark and the substrate, and a light shielding portion, provided between the second mark and the sensor, for shielding the light from the second mark against the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.