Compact vacuum pump
US7354254B2 · kind B2 · utility
3Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2004 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | Jan 5, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K7/14
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A compact turbomolecular vacuum pump (1) is driven by a cup-type motor (8). The cup-shaped rotor of the motor is preferably integrated into the pump rotor (14) and may define corresponding pumping stages, for instance Holweck stages, wherein the stators (11, 12) of said stages being preferably obtained by superimposing stator rings (11′, 12′).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.