Hard coating and its production method
US7354640B2 · kind B2 · utility
4Cited by
1References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 16, 2005 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | Apr 19, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A hard coating formed by a physical vapor deposition method, comprising metal elements comprising Si and at least one selected from the group consisting of transition metal elements of Groups 4a, 5a and 6a in the Periodic Table, Al and B, and at least one non-metal element selected from the group consisting of C, N and O, the hard coating having a columnar structure comprising a multi-layer structure composed of pluralities of layers with Si content differences, crystal lattice stripes being continuous in the interlayer boundary regions, and each layer having a thickness of 0.1-100 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.