Electrode design and positioning for controlled movement of a moveable electrode and associated support structure

US7354787B2 · kind B2 · utility

Assignee

• Xerox Corporation · US

Inventors

• John Dunec · Palo Alto, US
• Eric Peeters · Fremont, US
• Armin R. Volkel · Mountain View, US
• Michel A. Rosa · San Jose, US
• Dirk DeBruyker · San Jose, US
• Thomas Hantschel · Houtvenne, BE

Key dates

• Filing date: Mar 30, 2005
• Grant date: Apr 8, 2008
• Expiry date: Mar 30, 2025

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/058
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.