Method and system for smart vehicle route selection
US7356378B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2007 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | Apr 3, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/60
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system (“MES”) for providing lot information; a material control system (“MCS”) for providing dynamic traffic information; an automated material handling system (“AMHS”) for providing static route information; and a real-time dispatching (“RTD”) system to select a destination and a route for a wafer carrier in response to a transfer request. In another aspect a method of transferring a wafer lot within a wafer fabrication facility (“fab”) using a factory automation system is provided. The method comprises: receiving a transfer request to move the wafer lot from a first position to a second position within the fab; obtaining lot information, dynamic traffic information, and static traffic information; using the information to select a route between the first position and the second position; and executing the transfer using the selected route.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.