Contamination control apparatus, management system and related methods
US7357144B2 · kind B2 · utility
8Cited by
6References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2004 |
| Grant date | Apr 15, 2008 |
| Priority date | — |
| Expiry date | May 17, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7062
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A contamination control apparatus includes at least two pipes connected by a joint portion and configured to allow a processing fluid to flow therethrough, and a cover configured to enclose the joint portion and to provide an enclosed cavity between the cover and the joint portion. An inlet port is connected to the cover and configured to supply a gas to the cavity. An outlet port is connected to the cover and configured to exhaust the gas and a contaminant from the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.